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High reflectivity of mirrors is very important for many applications in the vacuum ultraviolet, such as for space observation, synchrotron radiation. This paper focuses on the substrate temperature\textquoterights effect on the performance of Al mirrors when depositing the upper MgF2 layer. Al films are deposited on the substrates at room temperature by thermal evaporation, and a 5 nm MgF2 film is deposited on Al coating at room temperature immediately. Heating the substrate to various temperatures r ...
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YEAR: 2019   DOI: 10.1117/12.2540004